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Technology Overview
> MOCVI
Metal-Organic Chemical Vapor
Infiltration |
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Potential applications include:
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Protection of C/SiC, SiC/SiC, and C/C
composites
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Protective overlayers on fibers/fiber
coatings (carbon-based T-300, SiC, and oxide fibers can be deposited
directly on woven fabrics and preforms
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Protective overcoats on thermal barrier
coatings
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Conformal hermetic coverage for MEMS devices
and miniature components used in biomedical, semiconductor, photonic, and
other industrial processes
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Passivation and low-friction surface
modifications of metals and alloys
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Applied Thin Films, Inc. introduces a low-cost & high throughput
metal-organic chemical vapor infiltration (MOCVI) process for conformal
deposition of amorphous alumina and alumina-based coatings. Dense, uniform,
hermetic, highly conformal, and smooth films are deposited at relatively low
temperatures (400–700ºC). The process can accommodate complex-shaped objects
with submicron-sized holes/features. A variety of substrates including
fibers, woven fabrics, multilayer fabric preforms, metal foils and alloys,
and other proprietary materials have been coated. Coating thickness can be
varied from 50nm to 10 microns or more with deposition rates greater than 1
mm/minute.
The
process allows for deposition at high rates (over 1µm/minute) with a high
degree of uniformity and smoothness. The reactor configuration can be scaled
up easily to accommodate large substrates. The use of inexpensive precursor
and exhaust treatment makes this process economical with minimal
environmental impact and low maintenance. The MOCVI process is also suitable
for chemical manipulation/tailoring of coatings such that doped layers can
be grown to enhance desirable properties. |
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Applied Thin Films, Inc.
